Ultra-precision machining business
Successfully achieved high-precision flatness finishing! Also compatible with the regeneration of currently used pin chucks!
At Teiji Co., Ltd., we are engaged in the ultra-precision machining of ceramics. Our company possesses top-class precision machining technology, which is applied in the manufacturing of semiconductor manufacturing equipment parts and LCD-related components. Among these, our pin chucks for semiconductor exposure equipment have successfully achieved high-precision flatness finishing of less than 0.2μm, and they are adopted by a wide range of semiconductor manufacturers. We also support the regeneration of not only new products but also currently used pin chucks. 【Features】 - Manufacturing and regeneration of semiconductor pin chucks compatible with various exposure equipment manufacturers - Achieving accurate and precise flatness measurement using a non-contact laser interferometer - Responding to requests with high technical capabilities in the finishing processes of ceramics, including flatness, parallelism, perpendicularity, and roughness. *For more details, please refer to the related links or feel free to contact us.
- Company：テージー
- Price：Other
